EpiEL GaN/Si Test Solution
MaxMile EpiEL GaN/Si test solution is developed to characterize
LED epiwafers with opaque substrate, such as GaN on silicon substrate, while regular
EpiEL or other EL test tools are not so effective in testing these wafers.
Sample curves of a 8 inches GaN/Si LED epiwafer
EpiEL GaN/Si solution can be implemented as a dedicated system or
as an option of EpiEL or EL/PL combination mapping system. It is
very efficient in characterizing GaN LED deposited on silicon substrates. With up to 12 inches
wafer handling capability, MaxMile EpiEL GaN/Si solution can meet current demanding needs of LED industry.