System Platform and Functions
MaxMile EpiEL, PL, or EL/PL combination system can be built as either desktop or standalone in system platform.
Desktop system can be 4-inch platform which supports wafer size from 2" up to 4", or 8-inch platform which supports wafer size from 2" up to 8". Desktop system only supports manual wafer loading using a dedicated wafer plate for each wafer size.
Desktop 4 Inches
Desktop 8 Inches
Standalone system can be configured with or without automated wafer transportation robot. Automated wafer transportat robot can
be either MaxMile robot (Robot I) or commercial robot (Robot II). System with MaxMile robot supports only one cassette station while system
with commerical robot supports up to three cassette stations. Both robot systems test wafers from 2" to 8"; while Robot I system has an option up to 12".
Depending on its configuration, MaxMile EpiEL, PL or EL/PL combination system can provide some or all of following test capabilities on LED epiwafers:
Standard configuration of EpiEL system have functions of EL, IV, reverse, and warpage test, while other test functions will be optional.
More information about MaxMile Robot I System